Tips and Recommendations from ECL Engineers
To avoid costly contamination and downtime, lubricants used in wafer-stepping operations must offer broad material compatibility, exceptional stability in the presence of highly aggressive chemicals, low torque, low vapor pressure (to 10-12 Torr at 25°C), and extremely low out-gassing, essential for Class 1 through Class 10 clean room environments.
Motors, valves, and gears work better with fluorinated lubricants by ensuring low torque, low power output, and minimal heat generation. Fluorinated lubricants are also compatible with all commonly used materials of construction for gears and bearings.